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Finite Element Analysis and Optical Micro-Scanner Based on Ferroelectric Ceramics
Author(s): 
Pages: 1003-1007
Year: Issue:  11
Journal: Transactions of Beijing Institute of Technology

Keyword:  微扫描器柔性铰链有限元分析;
Abstract: 研究基于压电陶瓷和柔性铰链的光学微扫描器及其放大机构的位移放大原理,分析单轴圆弧型柔性铰链性能,利用有限元方法对光学微扫描器的柔性铰链放大机构进行仿真.结果表明:柔性铰链的最小厚度值为圆弧半径的2倍时,微扫描器位移放大结构达到稳定位移,放大机构的放大率提高到压电陶瓷驱动位移的3.25倍,进一步验证了放大机构设计的合理性.
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