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Research on a Shocking Accelerometer
Author(s): 
Pages: 48-49
Year: Issue:  1
Journal: ORDNANCE INDUSTRY AUTOMATION

Keyword:  压阻式传感器加速度计冲击实验;
Abstract: 介绍了一种周边固支圆形膜片硅压阻式冲击加速度计的工作原理和结构,以及硅膜片尺寸与传感器输出的计算关系,冲击加速度传感器的电阻设计,及其器件的制作工艺流程.通过冲击试验,证明了该加速度传感器在高加速度作用下的实用性.
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