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THE PREPARATION AND CLASSIFICATION OF BORON CARBIDE MICRO-POWDER AS ABRASIVE MATERIAL FOR SAPPHIRE WAFER
Pages: 16-21
Year: Issue:  6
Journal: Ferro-Alloys

Abstract: 蓝宝石晶片需求量的猛增促使碳化硼作为其研磨材料的用量也逐渐增加.简述了蓝宝石精磨专用W5碳化硼微粉的制备新工艺,研究了分散剂种类、分散剂用量、沉降时间和抽料高度对微粉分级的影响,并对新工艺制备的微粉和普通的微粉进行了分析表征.研究表明,混合分散剂的(SHMP+ KX-5060)分级效果最好,其最佳用量为0.4%;微粉分级的最佳沉降时间为3~4 h,抽料高度为20~25 cm;新工艺制备的微粉和普通微粉相比,具有圆形度高、颗粒尺寸分布范围窄(6.519~1.162 μm)、研磨速率高、研磨效果好等优点.
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