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The sequential coupling analysis of a cantilever driving by electrostatic force in an optical switch
Author(s): 
Pages: 17-20
Year: Issue:  3
Journal: OPTICAL INSTRUMENTS

Keyword:  悬臂梁静电力顺序耦合;
Abstract: 采用顺序耦合法,对光开关中的、静电驱动的悬臂梁进行分析,得出了悬臂梁的动态响应特性,并指出了空气阻尼对器件性能的影响,为微机械传感器的设计提供了有力的分析方法.
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