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Test and Analysis System of Micro Vibration Based on Polytec Laser Doppler Vibrometer
Author(s): 
Pages: 5-6,18
Year: Issue:  4
Journal: MEASUREMENT & CONTROL TECHNOLOGY

Keyword:  硅微谐振式传感器谐振频率品质因数线性调频信号线性调频Z变换;
Abstract: 给出了基于Polytec激光测振仪的微振动测试分析系统的组成及其采用的一种全新的频率特性的测试、分析方法.针对硅微谐振式传感器频率特性(谐振频率和品质因数)测量的特殊性,提出了以线性调频信号为激励信号、线性调频Z变换(CZT)为频谱分析工具的系统频率特性的动态测试方法,使得该系统能够高效、精确地测量机械式谐振传感器的频率特性.
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